A versatile diffractive maskless lithography for single-shot and serial microfabrication

TitleA versatile diffractive maskless lithography for single-shot and serial microfabrication
Publication TypeJournal Article
Year of Publication2010
AuthorsJenness, NJ, Hill, RT, Hucknall, A, Chilkoti, A, Clark, RL
JournalOptics Express
Volume18
Issue11
Pagination11754
Date Published2010
Abstract

We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and three dimensional micropatterns/structures in a variety of substrates. A straightforward graphical user interface was implemented to allow users to load templates and change patterning modes within the span of a few minutes. A minimum resolution of ~700 nm is demonstrated for both patterning modes, which compares favorably to the 232 nm resolution limit predicted by the Rayleigh criterion. The presented method is rapid and adaptable, allowing for the parallel fabrication of microstructures in photoresist as well as the fabrication of protein microstructures that retain functional activity.

DOI10.1364/OE.18.011754
Short TitleOpt. Express
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